Accuracy of Displacement Estimation and Selection of Capacitors for a Four Degrees of Freedom Capacitive Force Sensor

Force sensor has been used as requisite for knowing information on the amount and the directions of forces on the skin surface. We have developed a four-degrees-of-freedom capacitive force sensor (approximately 20×20×5 mm) that has a flexible structure and sixteen parallel plate capacitors. An iterative algorithm was developed for estimating four displacements from the sixteen capacitances using fourth-order polynomial approximation of characteristics between capacitance and displacement. The estimation results from measured capacitances had large error caused by deterioration of the characteristics. In this study, effective capacitors had major information were selected on the basis of the capacitance change range and the characteristic shape. Maximum errors in calibration and non-calibration points were 25%and 6.8%.However the maximum error was larger than desired value, the smallness of averaged value indicated the occurrence of a few large error points. On the other hand, error in non-calibration point was within desired value. Keywords—Force sensors, capacitive sensors, estimation, iterative algorithms.